Micromachines, Free Full-Text

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Three-dimensional (3D) printing has allowed for the production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansion in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser-induced chemical etching (FLICE)—which is a subtractive 3D printing technique—has proved itself a powerful approach. Here, we demonstrate the fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with an identical lateral and longitudinal feature size of ~20 μm. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica, which results in depth-insensitive focusing of the laser pulses inside fused silica.